Systems and methods for the combinatorial synthesis of novel materials

A shutter mask system for use in a substrate processing chamber of the type having a pedestal with a substrate support surface, the shutter mask system comprising:

• a frame adapted for coupling a mask system to the processing chamber;
• at least two physical masks in said mask system movably mounted to the frame and positioned to form at least one opening between the masks to allow delivery of components through the opening onto a substrate on the pedestal;
• one or more drives for moving the physical masks in one or more directions to vary the size, shape and position of the opening relative to the substrate and for generating in a combinatorial fashion an array of resulting materials having thickness gradients on said substrate;
• a control system coupled to the drives for moving the physical masks during deposition and forming an array of resulting materials on the substrate that differ in thickness.

A shutter mask system for use in a substrate processing chamber of the type having a pedestal with a substrate support surface, the shutter mask system comprising:

• a frame adapted for coupling a mask system to the processing chamber;
• at least two physical masks in said mask system movably mounted to the frame and positioned to form at least one opening between the masks to allow delivery of components through the opening onto a substrate on the pedestal;
• one or more drives for moving the physical masks in one or more directions to vary the size, shape and position of the opening relative to the substrate and for generating in a combinatorial fashion an array of resulting materials having stoichiometry gradients on said substrate;
• a control system coupled to the drives for moving the physical masks during deposition and forming an array of resulting materials on the substrate that differ in stoichiometry.

A shutter mask system for use in a substrate processing chamber of the type having a pedestal with a substrate support surface, the shutter mask system comprising:

• a frame adapted for coupling a mask system to the processing chamber;
• at least two physical masks in said mask system movably mounted to the frame and positioned to form at least one opening between the masks to allow delivery of components through the opening onto a substrate on the pedestal;
• one or more drives for moving the physical masks in one or more directions to vary the size, shape and position of the opening relative to the substrate and for generating in a combinatorial fashion an array of resulting materials having composition, thickness, or stoichiometry gradients on said substrate;
• a control system coupled to the drives for moving the physical masks during deposition and forming an array of resulting materials on the substrate that differ in composition, stoichiometry or thickness.