C23C 14/246
Replenishment of source material
Official title: {Replenishment of source material}
C23C14/246 (Replenishment of source material) appears on 232 US grants and 343 published applications in this corpus.
Search patents in C23C- Granted patents
- 232
- Published applications
- 343
- Assignees
- 171
- Inventors
- 762
- Latest grant
- 28 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 5 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 2 | 0 |
| 1987 | 2 | 0 |
| 1988 | 2 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 3 | 0 |
| 1992 | 5 | 0 |
| 1993 | 4 | 0 |
| 1994 | 3 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 4 | 0 |
| 2000 | 4 | 0 |
| 2001 | 2 | 2 |
| 2002 | 4 | 1 |
| 2003 | 5 | 11 |
| 2004 | 4 | 11 |
| 2005 | 5 | 11 |
| 2006 | 1 | 18 |
| 2007 | 10 | 17 |
| 2008 | 5 | 13 |
| 2009 | 6 | 16 |
| 2010 | 6 | 23 |
| 2011 | 16 | 20 |
| 2012 | 12 | 20 |
| 2013 | 8 | 20 |
| 2014 | 7 | 14 |
| 2015 | 8 | 14 |
| 2016 | 9 | 14 |
| 2017 | 5 | 20 |
| 2018 | 8 | 12 |
| 2019 | 15 | 18 |
| 2020 | 12 | 11 |
| 2021 | 2 | 17 |
| 2022 | 8 | 12 |
| 2023 | 12 | 8 |
| 2024 | 4 | 6 |
| 2025 | 11 | 7 |
| 2026 | 3 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Fill vessels and connectors for chemical sublimators28 Jul 2026US 12,692,599 B2ASM IP Holding B. V.
- Solid material container and solid material product with solid material filled in solid material container21 Apr 2026US 12,606,909 B2L Air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation des Procedes Georges Claude
- In-situ solid chemical vapor deposition precursor delivery10 Feb 2026US 12,545,997 B2Rtx Corporation
- Remote reactant reservoirs for codeposition with variable melt area evaporant flux control30 Dec 2025US 12,509,769 B1HelioSourceTech, LLC
- Remote reactant reservoirs for codeposition with variable melt area evaporant flux control7 Oct 2025US 12,435,414 B1HelioSourceTech, LLC
- Improved css deposition process27 Aug 2026US 2026/0250832 A1Nanofilm Technologies International Limited
- Evaporation source for vacuum evaporation apparatus and vacuum evaporation method20 Aug 2026US 2026/0242929 A1Ulvac, Inc.
- Processes for metallization and products formed therefrom23 Jul 2026US 2026/0209930 A1Melodea Ltd.
- Method of using a tle system and tle system25 Jun 2026US 2026/0176741 A1Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- In-situ solid chemical vapor deposition precursor delivery21 May 2026US 2026/0139372 A1Rtx Corporation
Most cited
By later US patents
- Monomer atomizer for vaporization134US 4,696,719 ASpectrum Control, Inc. · 1987
- Thermal physical vapor deposition apparatus with detachable vapor source(s) and method91US 6,749,906 B2Eastman Kodak Company · 2004
- Apparatus and method for depositing a semiconductor material65US 6,037,241 AFirst Solar, Inc. · 2000
- Methods for co-flash evaporation of polymerizable monomers and non-polymerizable carrier solvent/salt mixtures/solutions62US 8,084,102 B2Sion Power Corporation · 2011
- Method of producing carbon-containing materials by electron beam vacuum evaporation of graphite and subsequent condensation51US 5,296,274 A1994