Thermal physical vapor deposition apparatus with detachable vapor source(s) and method
AssigneeEastman Kodak Company
InventorSteven A. Van Slyke
Life of this patent
Estimating the term…
Abstract
A thermal physical vapor deposition apparatus includes an elongated vapor distributor disposed in a chamber held at reduced pressure, and spaced from a structure which is to receive an organic layer in forming part of an OLED. One or more detachable organic material vapor sources are disposed outside of the chamber, and a vapor transport device including a valve sealingly connects each attached vapor source to the vapor distributor. During vapor deposition of the organic layer, the structure is moved with respect to the vapor distributor to provide an organic layer of improved uniformity on the structure.
Claims36
A thermal physical vapor deposition apparatus for vaporizing solid organic materials and applying vaporized organic materials as an organic layer onto structure in a chamber at reduced pressure in forming a part of an organic light-emitting device (OLED), comprising:
- a) an elongated vapor distributor disposed in the chamber and spaced from the structure, the vapor distributor defining an elongated cavity having a plurality of vapor efflux apertures formed along an elongated direction of the distributor for delivering vaporized organic materials in the space between the distributor and the structure for depositing an organic layer onto the structure;
- b) one or more detachable organic material vapor sources which are disposed outside of the chamber and can be attached, and when operative, to deliver vaporized organic materials into the cavity of the vapor distributor;
- and
- c) a vapor transport device dedicated to each of the one or more organic material vapor sources and sealingly extending into the cavity, the vapor transport device including means for detaching or for sealingly attaching an organic material vapor source.
A thermal physical vapor deposition apparatus for vaporizing solid organic materials and applying vaporized organic materials as an organic layer onto structure in a chamber at reduced pressure in forming a part of an organic light-emitting device (OLED), comprising:
- a) an elongated vapor distributor disposed in the chamber and spaced from the structure, the vapor distributor defining an elongated cavity having a plurality of vapor efflux apertures formed along an elongated direction of the distributor for delivering vaporized organic materials in the space between the distributor and the structure for depositing an organic layer onto the structure;
- b) a plurality of detachable organic material vapor sources which are disposed outside of the chamber and can be attached, and when operative, to deliver vaporized organic materials into the cavity of the vapor distributor;
- and
- c) a vapor transport device dedicated to each of the plurality of organic material vapor sources and sealingly extending into the cavity, the vapor transport device including means for detaching or for sealingly attaching an organic material vapor source, and the vapor transport device further including a valve which is effective in a closed position prior to detaching a vapor source and which is effective in an open position upon attaching a vapor source so that the reduced pressure in the chamber is maintained whenever one or more organic material vapor sources are detached from or attached to the vapor transport device.
A method of making an organic layer on a structure in a chamber at reduced pressure in forming a part of an organic light-emitting device (OLED), comprising the steps of:
- a) positioning an elongated vapor distributor in the chamber and spaced from the structure, and defining a plurality of vapor efflux apertures along an elongated direction of the distributor facing the structure;
- b) providing one or more detachable organic material vapor sources disposed outside of the chamber which can be attached, and when operative, to deliver vaporized organic materials;
- and
- c) operatively connecting a vapor transport device between the vapor distributor and each of the one or more vapor sources.
Dependencies are inferred from the claim text.