Fill vessels and connectors for chemical sublimators
AssigneeASM IP Holding B.V.
InventorsPaul Ma, Carl Louis White, Eric James Shero
Life of this patent
Estimating the term…
Abstract
Herein disclosed are systems and methods related to solid source chemical intermediate fill vessels. The fill vessel can include a proximate end, a distal end, and a base disposed at the proximate end that is configured to hold solid source chemical reactant therein. The intermediate fill vessel can further include a lid at the distal end comprising a second thermal conductor. The lid can include a chemical inlet, a carrier gas inlet, and a chemical outlet. The fill vessel can further include an intermediate layer that is disposed between the base and the lid. The intermediate layer may include an insulator that is configured to reduce heat flow between the base and the lid.
Claims19
A solid source chemical intermediate fill vessel comprising:
- a proximate end;
- a distal end;
- a base at the proximate end configured to hold a solid source chemical reactant therein, the base comprising a first thermal conductor;
- a cooling plate in thermal contact with the first thermal conductor, disposed outside of an inside volume of the fill vessel, wherein the cooling plate is configured to maintain the base at or below a first threshold temperature;
- a lid at the distal end comprising a second thermal conductor, the lid comprising:
- a chemical inlet configured to receive vaporized chemical reactant into the base;
- a carrier gas inlet configured to receive a flow of a carrier gas therethrough;
- and
- a chemical outlet configured to pass vaporized chemical reactant from the lid, wherein the chemical inlet, the carrier gas inlet and the chemical outlet open to the inside volume of the fill vessel through the lid;
- and
- an intermediate layer disposed between the base and the lid and in thermal communication with the lid and the base, the intermediate layer comprising an insulator configured to reduce heat flow between the base and the lid, wherein the lid or the base, or a combination thereof are mechanically coupled to the intermediate layer, wherein the mechanical coupling comprises a gas-tight seal.
A solid source chemical system comprising:
- a solid source chemical intermediate fill vessel comprising:
- a proximate end;
- a distal end;
- a base at the proximate end configured to hold a solid source chemical reactant therein, the base comprising a first thermal conductor;
- a cooling plate in thermal contact with the first thermal conductor, disposed outside of an inside volume of the fill vessel, wherein the cooling plate is configured to maintain the base at or below a first threshold temperature;
- a lid at the distal end comprising a second thermal conductor, the lid comprising:
- a chemical inlet configured to receive vaporized chemical reactant into the base;
- a carrier gas inlet configured to receive a flow of a carrier gas therethrough;
- and
- a chemical outlet configured to pass vaporized chemical reactant from the lid, wherein the chemical inlet, the carrier gas inlet and the chemical outlet open to the inside volume of the fill vessel through the lid;
- and
- an intermediate layer disposed between the base and the lid and in thermal communication with the lid and the base, the intermediate layer comprising an insulator configured to reduce heat flow between the base and the lid, wherein the lid or the base, or a combination thereof are mechanically coupled to the intermediate layer, wherein the mechanical coupling comprises a gas-tight seal.
Dependencies are inferred from the claim text.