Solid material container and solid material product with solid material filled in solid material container
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsKohei Tarutani, Jean-Marc Girard, Nicolas Blasco
Life of this patent
Estimating the term…
Abstract
A solid material container for supplying solid materials housed inside by evaporating the solid materials, and includes a carrier gas introduction line, a first filling section that is filled with the solid material, a second filling section that is located in at least a part of an outer periphery of the first filling section, and is filled with the solid material, at least one tray-shaped third filling section that is disposed on the ceiling side of an interior of the solid material container, and a solid material lead-out line.
Claims15
A sublimation container (1) configured for holding a solid material (S1, S2, S3), heating the solid material and flowing a carrier gas through the sublimation container (1) to form a product gas comprising the carrier gas and a vapor of the solid material (S1, S2, S3) formed by sublimation of the solid material (S1, S2, S3), the sublimation container (1) comprising:
- a) an exterior side wall (41) and an exterior bottom (41) forming a partially enclosed space,
- b) a lid (42) detachably connected (43) to the exterior side wall (41),
- c) a carrier gas inlet conduit (11) extending through the lid (42) and ending within the sublimation container (1) at a carrier gas outlet (13),
- d) a product gas outlet conduit (12) having a product gas inlet (14) within the sublimation container (1) and extending through the lid (42),
- e) two tier sets of solid material (S1, S2, S3) holding areas (21, 21, 23) with
- a first tier (21, 22) located adjacent to and in contact with the exterior bottom (41), and
- a second tier (23) comprising a second tier tray (31) above the first tier (21, 22) and located adjacent to and in contact with the lid (42),
- the tray (31) comprising a second tier gas flow aperture (51) in direct fluid communication with a second solid material holding area (22, S2),
- f) the first tier (21, 22) comprising an initial solid material holding area (21, S1) and the second solid material holding area (22, S2),
- the second solid material holding area (22, S2) located between the initial solid material holding area (21, S1) and the exterior side wall (41),
- the initial solid material holding area (21, S1) and the second solid material holding area (22, S2) being separated by a partitioning wall (32) having a first tier gas flow aperture (33) adapted to permit the flow of the carrier gas and the vapor of the solid material (S1) from the initial solid material holding area (21, S1) to the second solid material holding area (22, S2),
- g) the second tier tray (31) comprising a second tier solid material holding area (23, S3),
- h) the carrier gas inlet conduit (11) extending through the second tier tray (31) into the initial solid material holding area (21, S1) and ending with the carrier gas outlet (13) within the initial solid material holding area (21),
- i) the product gas inlet (14) of the product gas outlet conduit (12) being located within the second tier solid material holding area (23, S3),
- j) wherein the lid (42) and the carrier gas inlet conduit (11), extending through the second tier tray (31) into the initial solid material holding area (21, S1), are configured to form gas tight seals so that a gas flow path for the carrier gas and the product gas flow path through the sublimator (1) is formed from the carrier gas outlet (13) into the initial solid material holding area (21, S1), then through the first tier gas flow aperture (33) into the second solid material holding area (22, S2), then through the second tier gas flow aperture (51) into the second tier solid material holding area (23, S3), then into the product gas inlet (14) of the product gas outlet conduit (12).
Dependencies are inferred from the claim text.