Monomer atomizer for vaporization
AssigneeSpectrum Control, Inc.
InventorGregg C. Bischoff
Life of this patent
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Abstract
An atomizer with a capillary passage to a tip surface which is vibrated by a directly coupled ultrasonic device to disperse droplets of liquid fed to the passage. The tip is associated with a heated vaporization chamber, and a cooling chamber between the tip and the ultrasonic device protects the device from the heat of the chamber.
Claims8
An atomizer for liquids to be vaporized comprising, in combination, an elongated unitary structure having a tip portion at one end, an ultrasonic vibration device coupled to the opposite end of said structure, means for energizing said device to impart ultrasonic vibration to said tip portion, the tip portion having an end surface and defining a capillary passage ending at said end surface, the tip being mounted such that the end surface is located at approximately one-quarter wavelength from a nodal position and means for conveying liquid to said passage for liquid flow onto said surface and dispersion into atomized liquid particles.
A liquid vaporization apparatus comprising, in combination, a vacuum chamber, a heated vaporization chamber mounted in said vacuum chamber, an elongated unitary structure mounted in said vacuum chamber including a tip portion at one end extending into said vaporization chamber, an ultrasonic vibration device coupled to the opposite end of said structure, means for energizing said device to impart ultrasonic vibration to said tip portion, said tip portion having an end surface located approximately one-quarter wavelength from a nodal position and defining a capillary passage ending at said end surface, means for conveying liquid to said passage for liquid flow onto said surface and dispersion into atomized liquid particles to be vaporized, a cooling chamber interposed in said structure between said vaporization chamber and said device, and means for flowing cooling fluid through said chamber so as to thermally isolate the device from the vaporization chamber.
Dependencies are inferred from the claim text.