Remote reactant reservoirs for codeposition with variable melt area evaporant flux control
AssigneeHelioSourceTech, LLC
InventorsBilly Jack Stanbery, Walter Seaman
Life of this patent
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AssigneeHelioSourceTech, LLC
InventorsBilly Jack Stanbery, Walter Seaman
Estimating the term…
Methods include operating a reactant precursor vapor flux control and delivery system located in a vacuum deposition chamber comprising conveying feedstock from a feedstock buffer reservoir to an evaporation source reservoir coupled to the feedstock buffer reservoir, the evaporation source reservoir having a cavity shape that defines a evaporant pool surface area that increases as a function of fill level and conveying reactant precursor vapor from the evaporation source reservoir to a deposition zone. Apparatus includes a reactant precursor vapor flux control and delivery system located in a vacuum deposition chamber, the reactant precursor vapor flux control and delivery system comprising a feedstock buffer reservoir and an evaporation source reservoir coupled to the feedstock buffer reservoir, the evaporation source reservoir having a cavity shape that defines a evaporant pool surface area that increases as a function of fill level.
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.