B81C 1/00984
Methods for avoiding stiction when the device is in use not provided
Official title: {Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976}
B81C1/00984 (Methods for avoiding stiction when the device is in use not provided) appears on 48 US grants and 57 published applications in this corpus.
Search patents in B81C- Granted patents
- 48
- Published applications
- 57
- Assignees
- 22
- Inventors
- 106
- Latest grant
- 10 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 1 | 1 |
| 2012 | 0 | 1 |
| 2013 | 0 | 2 |
| 2014 | 2 | 6 |
| 2015 | 7 | 4 |
| 2016 | 3 | 3 |
| 2017 | 1 | 4 |
| 2018 | 6 | 9 |
| 2019 | 7 | 7 |
| 2020 | 8 | 6 |
| 2021 | 2 | 3 |
| 2022 | 2 | 1 |
| 2023 | 5 | 3 |
| 2024 | 2 | 3 |
| 2025 | 1 | 3 |
| 2026 | 1 | 0 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- MEMS device, method for manufacturing MEMS device and electronic device10 Mar 2026US 12,570,519 B2Beijing BOE Technology Development Co., Ltd.
- Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices1 Apr 2025US 12,263,506 B2Bfly Operations, Inc.
- Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure26 Nov 2024US 12,151,932 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices30 Jan 2024US 11,883,845 B2Bfly Operations, Inc.
- Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure14 Nov 2023US 11,814,283 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices17 Jul 2025US 2025/0229292 A1Bfly Operations, Inc.
- Anti-stiction layer deposition8 May 2025US 2025/0145448 A1
- Forming a passivation coating for mems devices2 Jan 2025US 2025/0002334 A1Texas Instruments Incorporated
- Double layer mems devices29 Aug 2024US 2024/0286890 A1Murata Manufacturing Co., Ltd.
- Mems device, method for manufacturing mems device and electronic device8 Aug 2024US 2024/0262678 A1Beijing BOE Technology Development Co., Ltd.
Most cited
By later US patents
- MEMS structure and method of forming same50US 9,065,358 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2015
- MEMS microphone and method for manufacture14US 8,664,733 B2Epcos AG · 2014
- Micro-electro-mechanical systems (MEMS) device and method for fabricating the MEMS11US 10,250,998 B2Solid State Systems, Inc. · 2019
- Movement microelectromechanical systems (MEMS) package11US 9,527,721 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2016
- Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process6US 9,061,895 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives · 2015