B81C 1/00539
Wet etching
Official title: {Wet etching}
B81C1/00539 (Wet etching) appears on 135 US grants and 160 published applications in this corpus.
Search patents in B81C- Granted patents
- 135
- Published applications
- 160
- Assignees
- 103
- Inventors
- 368
- Latest grant
- 27 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 3 |
| 2005 | 1 | 3 |
| 2006 | 3 | 4 |
| 2007 | 2 | 2 |
| 2008 | 1 | 2 |
| 2009 | 1 | 3 |
| 2010 | 3 | 7 |
| 2011 | 2 | 5 |
| 2012 | 5 | 2 |
| 2013 | 1 | 6 |
| 2014 | 10 | 19 |
| 2015 | 12 | 15 |
| 2016 | 13 | 11 |
| 2017 | 10 | 12 |
| 2018 | 13 | 6 |
| 2019 | 8 | 10 |
| 2020 | 10 | 11 |
| 2021 | 13 | 14 |
| 2022 | 7 | 7 |
| 2023 | 6 | 4 |
| 2024 | 7 | 6 |
| 2025 | 4 | 7 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for wafer treatment27 Jan 2026US 12,538,764 B2Hua Hsu Advanced Technology Co., Ltd.
- Production method for Fabry-Perot interference filter19 Aug 2025US 12,392,661 B2Hamamatsu Photonics K.K.
- Method for processing glass by alkaline etching12 Aug 2025US 12,384,714 B2Schott AG
- Systems, devices, and/or methods for images22 Jul 2025US 12,365,619 B2
- Manufacturing a semiconductor structure15 Apr 2025US 12,276,839 B2Smart Photonics Holding B.V.
- Method for fabricating an enclosure of a photoacoustic detecting device1 Jan 2026US 2026/0002912 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Production method for fabry-perot interference filter30 Oct 2025US 2025/0334448 A1Hamamatsu Photonics K.K.
- Systems, Devices, and/or Methods for Images25 Sep 2025US 2025/0296875 A1
- Optical signal redirection structure for photonics device31 Jul 2025US 2025/0244543 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Manufacturing a semiconductor structure26 Jun 2025US 2025/0208349 A1Smart Photonics Holding B.V.
Most cited
By later US patents
- Analyte sensor and fabrication methods85US 8,696,917 B2Edwards Lifesciences Corporation · 2014
- Methods and systems for metal-assisted chemical etching of substrates35US 8,278,191 B2Georgia Tech Research Corporation · 2012
- Method and apparatus for ultrasonic wet etching of silicon25US 6,224,713 B1Micron Technology, Inc. · 2001
- Wet processing using a fluid meniscus, apparatus and method22US 7,122,126 B1Materials Technologies Corporation · 2006
- Method and apparatus for ultrasonic wet etching of silicon19US 6,124,214 AMicron Technology, Inc. · 2000