Method for fabricating an enclosure of a photoacoustic detecting device

A method for fabricating an enclosure bounding a hollow cavity, the enclosure being configured to be applied against a sample to be analysed, the cavity being configured to extend between the sample and an acoustic transducer, the cavity opening onto a contact face intended to be applied against the sample, the enclosure comprising:

• a contact aperture formed in the contact face, and opening into the cavity;
• a membrane extending through the cavity, facing the contact face, so that all or part of the cavity lies between the membrane and a cover;
• wherein the method comprises the following steps:
• 1) microstructuring a first substrate, so as to form the cover;
• 2) microstructuring a second substrate, so as to form a rear portion of the enclosure, bounding all or part of the cavity, between the membrane and the cover;
• 3) microstructuring a third substrate, so as to form a front portion of the enclosure, comprising the membrane;
• 4) assembling the cover to the rear portion of the enclosure, and the rear portion of the enclosure to the front portion of the enclosure.