B81B 3/0056
Adjusting the distance between two elements, at least one of them being
Official title: {Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning}
B81B3/0056 (Adjusting the distance between two elements, at least one of them being) appears on 47 US grants and 67 published applications in this corpus.
Search patents in B81B- Granted patents
- 47
- Published applications
- 67
- Assignees
- 44
- Inventors
- 169
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2001 | 1 | 0 |
| 2002 | 2 | 1 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 1 |
| 2007 | 1 | 0 |
| 2008 | 0 | 0 |
| 2009 | 1 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 1 | 2 |
| 2013 | 0 | 0 |
| 2014 | 0 | 11 |
| 2015 | 6 | 6 |
| 2016 | 6 | 3 |
| 2017 | 2 | 5 |
| 2018 | 5 | 4 |
| 2019 | 4 | 6 |
| 2020 | 2 | 2 |
| 2021 | 3 | 6 |
| 2022 | 6 | 2 |
| 2023 | 0 | 3 |
| 2024 | 3 | 4 |
| 2025 | 1 | 5 |
| 2026 | 3 | 3 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- MEMS device6 Oct 2026US 12,753,069 B2Rohm Co., Ltd.
- Microelectromechanical sensor device with active offset compensation3 Feb 2026US 12,540,952 B2STMicroelectronics S,r.l.
- Laminated structure and method of manufacturing laminated structure20 Jan 2026US 12,532,128 B2Rohm Co., Ltd.
- Micromechanical component for a sensor or microphone device22 Jul 2025US 12,365,581 B2Robert Bosch GmbH
- Microphone assembly with disturbance compensation26 Nov 2024US 12,156,003 B2Knowles Electronics, LLC
- Microelectronic assemblies having air gap fiducials24 Sep 2026US 2026/0285672 A1Intel Corporation
- Mems with synchronous movable elements13 Aug 2026US 2026/0238931 A1
- Mems with adjusted semiconductor behavior22 Jan 2026US 2026/0025621 A1
- Mems cantilever-enclosure spacing5 Jun 2025US 2025/0178884 A1Soundskrit Inc.
- Pressure valve for microelectromechanical system die3 Apr 2025US 2025/0109010 A1Knowles Electronics, LLC
Most cited
By later US patents
- Variable capacitor and associated fabrication method99US 6,229,684 B1JDS Uniphase Corporation · 2001
- Hybrid microelectromechanical system tunable capacitor and associated fabrication methods81US 6,377,438 B1Mcnc · 2002
- Miniaturized and ruggedized wafer level MEMs force sensors16US 9,902,611 B2NextInput, Inc. · 2018
- Post-release capacitance enhancement in micromachined devices and a method of performing the same14US 7,279,761 B2The Regents of the University of California · 2007
- Sensitivity compensation for capacitive MEMS device13US 10,433,070 B2Infineon Technologies AG · 2019