Pressure valve for microelectromechanical system die

A microelectromechanical system (MEMS) die, comprising:

• a substrate having an opening;
• a diaphragm attached to the substrate around a periphery of the opening so as to cover the opening, the diaphragm having an aperture;
• and
• a backplate separated from the diaphragm and disposed on a side of the diaphragm opposite the substrate, the backplate comprising a plug that extends toward the aperture from an attached end to a free end;
• wherein the free end of the plug has a larger area than the aperture.

A microelectromechanical system (MEMS) die, comprising:

• a substrate having an opening;
• a diaphragm attached to the substrate around a periphery of the opening so as to cover the opening, the diaphragm having an aperture;
• and
• a backplate separated from the diaphragm and disposed on a side of the diaphragm opposite the substrate, the backplate comprising a plug that extends toward the aperture from an attached end to a free end;
• wherein the free end of the plug has a larger area than the aperture;
• and
• wherein the free end of the plug has a pierce that allows for fluid communication through the backplate and the aperture.