Microelectronic assemblies having air gap fiducials
AssigneeIntel Corporation
InventorsHaris Khan Niazi, Shawna M. Liff, Bhaskar Jyoti Krishnatreya
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Abstract
Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a first microelectronic component having a first bonding layer with a first air gap fiducial; and a second microelectronic component having a second bonding layer with a second air gap fiducial, wherein the first microelectronic component is coupled to the second microelectronic component by the first and second bonding layers, and wherein the first air gap fiducial and the second air gap fiducial are aligned.
Claims20
A microelectronic component, comprising:
- a plurality of layers having a first surface and an opposing second surface, wherein at least one of the plurality of layers includes an active area;
- and
- a fiducial in the active area of the at least one of the plurality of layers, wherein the fiducial includes a geometrically shaped space filled with air.
A microelectronic assembly, comprising:
- a first microelectronic component including a first bonding layer with a first air gap fiducial;
- and
- a second microelectronic component including a second bonding layer with a second air gap fiducial, wherein the first microelectronic component is coupled to the second microelectronic component by the first and second bonding layers, and wherein the first air gap fiducial and the second air gap fiducial are aligned.
A microelectronic assembly, comprising:
- a first microelectronic component including a first surface with a first air gap fiducial in an N-1 layer adjacent to an N layer at the first surface;
- and
- a second microelectronic component including a second surface with a second air gap fiducial in an N-1 layer adjacent to an N layer at the second surface, wherein the first microelectronic component is coupled to the second microelectronic component, and wherein the first air gap fiducial and the second air gap fiducial are aligned.
Dependencies are inferred from the claim text.