Micromechanical component for a sensor or microphone device
AssigneeRobert Bosch GmbH
InventorsHeribert Weber, Andreas Scheurle, Joachim Fritz, Peter Schmollngruber, Sophielouise Mach, Thomas Friedrich
Life of this patent
Estimating the term…
Loading patent…
AssigneeRobert Bosch GmbH
InventorsHeribert Weber, Andreas Scheurle, Joachim Fritz, Peter Schmollngruber, Sophielouise Mach, Thomas Friedrich
Estimating the term…
A micromechanical component for a sensor or microphone device, including a substrate, a frame structure, which is situated on the substrate surface and/or at least one intermediate layer, and a diaphragm, which spans an inner volume, which is at least partially framed by the frame structure. The micromechanical component includes a bending beam structure, which is situated in the inner volume and includes at least one anchoring area, which is attached to the frame structure, to the substrate surface and/or to the at least one intermediate layer, and at least one self-supporting area, which is connected via at least one coupling structure to the diaphragm inner side of the diaphragm in such a way that the at least one self-supporting area is bendable by way of a warping of the diaphragm.
A micromechanical component for a sensor or microphone device, comprising:
A manufacturing method for a micromechanical component for a sensor or microphone device, the method comprising the following steps:
Dependencies are inferred from the claim text.