Back to results
US 10,433,070 B2Granted
Sensitivity compensation for capacitive MEMS device
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Abidin Güçlü Onaran
Life of this patent
Estimating the term…
Abstract
A MEMS device includes a membrane and a counter electrode structure spaced apart from the membrane. The counter electrode structure includes a non-planar conductive layer. The MEMS device includes an air gap between the membrane and the counter electrode structure. The air gap has a non-uniform thickness.
Claims20
A MEMS device comprising:
- a membrane;
- a counter electrode structure spaced apart from the membrane, the counter electrode structure comprising a non-planar conductive layer, the counter electrode structure comprising a central region and a surrounding region, the central region comprising a first planar portion of the non-planar conductive layer, the surrounding region comprising a second planar portion of the non-planar conductive layer, the first planar portion of the non-planar conductive layer being parallel to the second planar portion of the non-planar conductive layer;
- and
- an air gap between the membrane and the counter electrode structure, the air gap having a non-uniform thickness.
1 more element
A MEMS device comprising:
- a first movable electrode structure;
- a second movable electrode structure spaced apart from the first movable electrode structure, the first movable electrode structure and the second movable electrode structure enclosing a gap between the first movable electrode structure and the second movable electrode structure, the gap having a gas pressure lower than an ambient pressure;
- a static electrode structure within the gap and interposed between the first movable electrode structure and the second movable electrode structure;
- and
- a plurality of pillars extending through the gap and connecting the first movable electrode structure and the second movable electrode structure, the plurality of pillars extending through the static electrode structure, the plurality of pillars dividing the gap into a plurality of gap regions, different gap regions having different thicknesses, wherein the plurality of pillars have a non-uniform pitch.
2 more elements
A MEMS device comprising:
- a first membrane;
- a second membrane spaced apart from the first membrane, the first membrane and the second membrane sealing a gap between the first membrane and the second membrane, the gap having a gas pressure lower than an ambient pressure;
- a counter electrode structure within the gap and between the first membrane and the second membrane, a first thickness of the gap adjacent a center of the counter electrode structure being greater than a second thickness of the gap adjacent an edge of the counter electrode structure;
- and
- a plurality of pillars within the gap and connecting the first membrane and the second membrane, the plurality of pillars extending through the counter electrode structure, wherein the plurality of pillars divide the gap into a plurality of gap regions, and wherein different gap regions have different widths.
2 more elements
Dependencies are inferred from the claim text.