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US 9,902,611 B2Granted
Miniaturized and ruggedized wafer level MEMs force sensors
AssigneeNextInput, Inc.
InventorsAmnon Brosh, Ryan Diestelhorst, Steven Nasiri
Life of this patent
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Abstract
Described herein is a miniaturized and ruggedized wafer level MEMS force sensor composed of a base and a cap. The sensor employs multiple flexible membranes, a mechanical overload stop, a retaining wall, and piezoresistive strain gauges.
Claims13
A force sensor, comprising:
- a base comprising at least one rigid boss and an outer wall,
- a cap attached to the base at a surface defined by the at least one rigid boss and the outer wall, wherein the cap and the base form a sealed cavity,
- at least one flexure formed in the base and around the at least one rigid boss to convert force applied to the cap into strain,
- a gap between the base and the cap that narrows with the application of the force to the cap such that the at least one flexure will not deform beyond its breaking point, and
- a sensor configured to sense strain on a bottom surface of the base.
2 more elements
Dependencies are inferred from the claim text.