Mems with synchronous movable elements

A method for operating a MEMS comprising a substrate, comprising a cavity disposed in the substrate and comprising a plurality of movable elements disposed in the cavity and formed to be active, the method comprising:

• moving the plurality of movable elements disposed in the cavity such that the movable elements interact with a fluid disposed in the cavity so that a movement of the fluid and a movement of the movable elements are causally related;
• such that the plurality of movable elements are electrically connected in parallel to each other via respective electrical conduction path with a common signal reference;
• and
• such that run time differences between the common signal reference, on the one hand, and the conduction paths of different movable elements, on the other hand, are adapted to each other in order to synchronize movements of the movable elements, said movements having been generated by an electrical signal provided at the signal reference, and/or in order to synchronize electrical signals generated by the movable elements through the movement at the location of the signal reference.