Laminated structure and method of manufacturing laminated structure

A laminated structure in which a material containing silicon is laminated, the laminated structure comprising:

• a frame body having a first surface and a second surface facing in mutually opposite directions in a thickness direction, the frame body including a film body supported by the frame body and a hollow portion opening at the second surface and located between the film body and the second surface;
• and
• a lid body attached to the frame body, the lid body including a first cavity located on the film body and an opening which communicates with the first cavity, the opening being formed at a position at which at least a part of the film body is exposed to an external space of the laminated structure, wherein
• the lid body includes a groove portion formed in a surface of the lid body facing the frame body, a second cavity that faces another film body, and a communication passage that communicates the first cavity with the second cavity, and
• the first cavity and the external space of the laminated structure communicate with each other through the groove portion.