Microelectromechanical sensor device with active offset compensation

A device, comprising:

• a substrate having a surface;
• a mass suspended over the surface of the substrate, the mass configured to move in a first direction;
• a first plurality of electrodes coupled to a first side of the mass, and extending in a second direction transverse to the first direction;
• a second plurality of electrodes coupled to a second side, opposite to the first side, of the mass, and extending in the second direction;
• a first compensation structure positioned at the first side of the mass, the first compensation structure includes a first actuation structure configured to rotate around a first axis extending in a third direction transverse to the first and second directions;
• a third plurality of electrodes coupled to the first compensation structure, and extending in the second direction, at least one of the third plurality of electrodes being positioned between two of the first plurality of electrodes, the first compensation structure configured to move the third plurality of electrodes in the first direction;
• a second compensation structure positioned at the second side of the mass, the second compensation structure includes a second actuation structure configured to rotate around a second axis extending in the third direction;
• and
• a fourth plurality of electrodes coupled to the second compensation structure, and extending in the second direction, at least one of the fourth plurality of electrodes being positioned between two of the second plurality of electrodes, the second compensation structure configured to move the fourth plurality of electrodes in the first direction.

A device, comprising:

• a substrate;
• an anchoring structure coupled to the substrate;
• a mass elastically coupled to the anchoring structure and suspended over a surface of the substrate, the mass configured to rotate around a first axis extending parallel to the surface of the substrate;
• a first electrode coupled to a first side of the mass;
• a second electrode coupled to a second side, opposite to the first side, of the mass;
• a first compensation structure positioned at the first side of the mass;
• a third electrode suspended over at least a portion of the first electrode, the first compensation structure configured to rotate the third electrode around a second axis parallel to the first axis;
• a second compensation structure positioned at the second side of the mass;
• a fourth electrode suspended over at least a portion of the second electrode, the second compensation structure configured to rotate the fourth electrode around a third axis parallel to the first axis.