B81B 3/0002
Arrangements for avoiding sticking of the flexible or moving parts
Official title: {Arrangements for avoiding sticking of the flexible or moving parts}
B81B3/0002 (Arrangements for avoiding sticking of the flexible or moving parts) appears on 624 US grants and 687 published applications in this corpus.
Search patents in B81B- Granted patents
- 624
- Published applications
- 687
- Assignees
- 219
- Inventors
- 1,230
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 5 | 0 |
| 1995 | 5 | 0 |
| 1996 | 3 | 0 |
| 1997 | 8 | 0 |
| 1998 | 5 | 0 |
| 1999 | 5 | 0 |
| 2000 | 5 | 0 |
| 2001 | 11 | 8 |
| 2002 | 12 | 23 |
| 2003 | 16 | 20 |
| 2004 | 24 | 20 |
| 2005 | 19 | 20 |
| 2006 | 12 | 18 |
| 2007 | 12 | 30 |
| 2008 | 24 | 32 |
| 2009 | 24 | 28 |
| 2010 | 21 | 14 |
| 2011 | 16 | 13 |
| 2012 | 19 | 31 |
| 2013 | 16 | 15 |
| 2014 | 21 | 40 |
| 2015 | 32 | 36 |
| 2016 | 31 | 33 |
| 2017 | 31 | 35 |
| 2018 | 29 | 36 |
| 2019 | 37 | 38 |
| 2020 | 36 | 35 |
| 2021 | 23 | 29 |
| 2022 | 30 | 32 |
| 2023 | 26 | 29 |
| 2024 | 27 | 25 |
| 2025 | 21 | 26 |
| 2026 | 14 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81B 3/001Structures having a reduced contact area289
- B81B 3/0005Anti-stiction coatings180
- B81B 3/0008Structures for avoiding electrostatic attraction129
- B81B 3/0013Structures dimensioned for mechanical prevention of stiction83
- B81B 3/0016Arrangements for avoiding sticking of the flexible or moving parts not provided35
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Micro-electro-mechanical system device1 Sep 2026US 12,722,968 B2Vanguard International Semiconductor Corporation
- Selective hydrophobic layer removal using UV irradiation with non-aligned mask25 Aug 2026US 12,715,758 B2InvenSense, Inc.
- Anti-stiction ionic lubricants in MEMS devices11 Aug 2026US 12,703,834 B1Texas Instruments Incorporated
- Method for structural layer fabrication in micromechanical devices14 Jul 2026US 12,679,723 B2Murata Manufacturing Co., Ltd.
- Microelectromechanical device with recovery from stiction conditions1 Oct 2026US 2026/0296874 A1STMicroelectronics International N. V.
- Systems and methods to reduce stiction in mems devices1 Oct 2026US 2026/0299283 A1Texas Instruments Incorporated
- Out-of-plane micro-electromechanical device with reinforced stopper and method for manufacturing a micro-electromechanical device25 Jun 2026US 2026/0176126 A1STMicroelectronics International N. V.
- Micro-electro-mechanical systems transducer with deflection constraint11 Jun 2026US 2026/0164182 A1Knowles Electronics, LLC
- Semiconductor device structure with movable membrane4 Jun 2026US 2026/0152380 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Method and apparatus for modulating a light beam609US 5,311,360 AThe Board of Trustees of the Leland Stanford Junior University · 1994
- Spatial light modulator and method555US 5,096,279 ATexas Instruments Incorporated · 1992
- Method and apparatus for modulating a light beam405US 5,808,797 ASilicon Light Machines Corporation · 1998
- Low reset voltage process for DMD363US 5,331,454 ATexas Instruments Incorporated · 1994
- Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate336US 5,459,610 AThe Board of Trustees of the Leland Stanford Junior University · 1995