B81B 3/001
Structures having a reduced contact area
Official title: {Structures having a reduced contact area, e.g. with bumps or with a textured surface}
B81B3/001 (Structures having a reduced contact area) appears on 289 US grants and 326 published applications in this corpus.
Search patents in B81B- Granted patents
- 289
- Published applications
- 326
- Assignees
- 125
- Inventors
- 607
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 4 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 4 | 2 |
| 2002 | 4 | 7 |
| 2003 | 4 | 3 |
| 2004 | 6 | 4 |
| 2005 | 4 | 5 |
| 2006 | 7 | 8 |
| 2007 | 2 | 9 |
| 2008 | 3 | 14 |
| 2009 | 10 | 10 |
| 2010 | 8 | 6 |
| 2011 | 7 | 2 |
| 2012 | 7 | 13 |
| 2013 | 6 | 6 |
| 2014 | 9 | 19 |
| 2015 | 15 | 20 |
| 2016 | 19 | 15 |
| 2017 | 15 | 23 |
| 2018 | 15 | 18 |
| 2019 | 18 | 19 |
| 2020 | 27 | 25 |
| 2021 | 12 | 18 |
| 2022 | 20 | 20 |
| 2023 | 15 | 20 |
| 2024 | 20 | 14 |
| 2025 | 10 | 15 |
| 2026 | 7 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Method for structural layer fabrication in micromechanical devices14 Jul 2026US 12,679,723 B2Murata Manufacturing Co., Ltd.
- Micro-electro-mechanical systems (MEMS) having vertical stops and anchor structures16 Jun 2026US 12,655,016 B2Lawrence Semiconductor Research Laboratory, Inc.
- MEMS bump stopper surface features5 May 2026US 12,617,670 B2Knowles Electronics, LLC
- MEMS device, method for manufacturing MEMS device and electronic device10 Mar 2026US 12,570,519 B2Beijing BOE Technology Development Co., Ltd.
- Out-of-plane micro-electromechanical device with reinforced stopper and method for manufacturing a micro-electromechanical device25 Jun 2026US 2026/0176126 A1STMicroelectronics International N. V.
- Micro-electro-mechanical systems transducer with deflection constraint11 Jun 2026US 2026/0164182 A1Knowles Electronics, LLC
- Semiconductor device structure with movable membrane4 Jun 2026US 2026/0152380 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Designs and methods for maufacturing out-of-plane rotation stops for mems devices21 May 2026US 2026/0138866 A1Huawei Technologies Co., Ltd.
- Mems device and manufacturing method for mems device16 Apr 2026US 2026/0103375 A1Murata Manufacturing Co., Ltd.
Most cited
By later US patents
- Method and apparatus for modulating a light beam609US 5,311,360 AThe Board of Trustees of the Leland Stanford Junior University · 1994
- Method and apparatus for modulating a light beam405US 5,808,797 ASilicon Light Machines Corporation · 1998
- Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate336US 5,459,610 AThe Board of Trustees of the Leland Stanford Junior University · 1995
- MEMS and CMOS integration with low-temperature bonding243US 9,394,161 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2016
- CMOS-MEMS device structure, bonding mesa structure and associated method235US 9,656,852 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2017