Semiconductor device structure with movable membrane
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Chuan TENG, Chun-Yin TSAI, Chia-Hua CHU, Chun-Wen CHENG
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Abstract
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a dielectric layer and a movable membrane formed over the dielectric layer. In addition, the movable membrane includes first recessed portions, and a first one of the first recessed portions has a rectangular shape or a fan shape in a top view. The movable membrane includes further includes second recessed portions surrounded by the first recessed portions in the top view.
Claims20
A semiconductor device structure, comprising:
- a dielectric layer;
- and
- a movable membrane formed over the dielectric layer, wherein the movable membrane comprises:
- first recessed portions, wherein a first one of the first recessed portions has a rectangular shape or a fan shape in a top view;
- and
- second recessed portions surrounded by the first recessed portions in the top view.
A semiconductor device structure, comprising:
- a first dielectric layer;
- and
- a movable membrane formed over the first dielectric layer, wherein the movable membrane comprises:
- an outer edge portion;
- and
- first recessed portions surrounded by the outer edge portion,
- wherein a first one of the first recessed portions has a bottom portion, a first sidewall portion and a second sidewall portion connecting to opposite sides of the bottom portion, and a third sidewall portion connecting to the bottom portion, the first sidewall portion, the second sidewall portion, and the outer edge portion.
A semiconductor device structure, comprising:
- a first dielectric layer having a cavity;
- and
- a first movable membrane formed over the dielectric layer, wherein the first movable membrane comprises:
- first recessed portions partially interfacing with the first dielectric layer while being partially exposed by the cavity;
- and
- second recessed portions surrounded by the first recessed portions in a top view,
- wherein a first one of the first recessed portions, a first one of the second recessed portions, and a center of the first movable membrane are coincident with a first line along a first direction in the top view.
Dependencies are inferred from the claim text.