B81B 3/0005
Anti-stiction coatings
Official title: {Anti-stiction coatings}
B81B3/0005 (Anti-stiction coatings) appears on 180 US grants and 191 published applications in this corpus.
Search patents in B81B- Granted patents
- 180
- Published applications
- 191
- Assignees
- 72
- Inventors
- 375
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 3 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 5 | 3 |
| 2002 | 4 | 4 |
| 2003 | 4 | 10 |
| 2004 | 7 | 9 |
| 2005 | 6 | 12 |
| 2006 | 2 | 6 |
| 2007 | 9 | 9 |
| 2008 | 12 | 15 |
| 2009 | 7 | 9 |
| 2010 | 7 | 2 |
| 2011 | 6 | 3 |
| 2012 | 4 | 7 |
| 2013 | 5 | 5 |
| 2014 | 6 | 11 |
| 2015 | 9 | 8 |
| 2016 | 8 | 7 |
| 2017 | 8 | 7 |
| 2018 | 7 | 11 |
| 2019 | 11 | 13 |
| 2020 | 9 | 8 |
| 2021 | 6 | 5 |
| 2022 | 6 | 7 |
| 2023 | 6 | 6 |
| 2024 | 6 | 4 |
| 2025 | 4 | 6 |
| 2026 | 2 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Selective hydrophobic layer removal using UV irradiation with non-aligned mask25 Aug 2026US 12,715,758 B2InvenSense, Inc.
- Anti-stiction ionic lubricants in MEMS devices11 Aug 2026US 12,703,834 B1Texas Instruments Incorporated
- Method and system for fabricating a MEMS device cap11 Nov 2025US 12,466,726 B2InvenSense, Inc.
- Semiconductor device and method for fabricating the same19 Aug 2025US 12,391,545 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Method and system for fabricating a MEMS device25 Mar 2025US 12,258,266 B2InvenSense, Inc.
- Anti-Stiction Process for Mems Device14 May 2026US 2026/0132019 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Roughness selectivity for mems movement stiction reduction19 Feb 2026US 2026/0048979 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor mems structure and method of forming the same8 Jan 2026US 2026/0008667 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Functionalized oxoacid lubricants in mems devices1 Jan 2026US 2026/0001755 A1Texas Instruments Incorporated
- Method and system for fabricating a mems device cap11 Dec 2025US 2025/0376371 A1InvenSense, Inc.
Most cited
By later US patents
- Low reset voltage process for DMD363US 5,331,454 ATexas Instruments Incorporated · 1994
- Low surface energy passivation layer for micromechanical devices293US 5,602,671 ATexas Instruments Incorporated · 1997
- Method of producing micromechanical devices273US 5,411,769 ATexas Instruments Incorporated · 1995
- Micropump with valve structure206US 5,259,737 ASeiko Epson Corporation · 1993
- PFPE coatings for micro-mechanical devices122US 5,512,374 ATexas Instruments Incorporated · 1996