PFPE coatings for micro-mechanical devices
AssigneeTexas Instruments Incorporated
InventorsRobert M. Wallace, Steven A. Henck, Douglas A. Webb
Life of this patent
Estimating the term…
Abstract
A micro-mechanical device (10) includes relatively movable elements (11, 17) which contact or engage and which thereafter stick or adhere. A perfluoropolyether (PFPE) film (31) is applied to the contacting or engaging portions of the elements (11,17) to ameliorate or eliminate such sticking or adhesion.
Claims27
An improved micro-mechanical device of the type having a first element selectively movable relative to a second element, portions of the elements contacting in one position of the first element, wherein the improvement comprises:
- a film of perfluoropolyether (PFPE) on at least one of the contacting portions of the elements.
A method of treating a micro-mechanical device of the type having a first element selectively movable relative to a second element, portions of the elements contacting in one position of the first element, the treatment being effective to overcome the tendency of the contacting portions to resist separating when the elements are moved apart, wherein the method comprises:
- depositing a film of perfluoropolyether (PFPE) on at least one of the contacting portions of the elements.
Dependencies are inferred from the claim text.