B81B 2203/055
Translation in a plane parallel to the substrate, i.e. enabling movement along
Official title: Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
B81B2203/055 (Translation in a plane parallel to the substrate, i.e. enabling movement along) appears on 60 US grants and 68 published applications in this corpus.
Search patents in B81B- Granted patents
- 60
- Published applications
- 68
- Assignees
- 45
- Inventors
- 146
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 2 | 2 |
| 2003 | 1 | 2 |
| 2004 | 3 | 3 |
| 2005 | 2 | 1 |
| 2006 | 2 | 0 |
| 2007 | 0 | 3 |
| 2008 | 2 | 0 |
| 2009 | 3 | 2 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 1 | 3 |
| 2014 | 0 | 1 |
| 2015 | 0 | 2 |
| 2016 | 3 | 1 |
| 2017 | 1 | 6 |
| 2018 | 2 | 2 |
| 2019 | 5 | 11 |
| 2020 | 7 | 4 |
| 2021 | 4 | 6 |
| 2022 | 5 | 1 |
| 2023 | 3 | 12 |
| 2024 | 5 | 3 |
| 2025 | 1 | 2 |
| 2026 | 5 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS die and MEMS-based vibration sensor15 Sep 2026US 12,735,313 B2Knowles Electronics, LLC
- Microelectromechanical accelerometer with force feedback loop8 Sep 2026US 12,729,108 B2STMicroelectronics International N. V.
- Process for manufacturing a micro-electro-mechanical device from a single semiconductor wafer and related MEMS device31 Mar 2026US 12,589,989 B2STMicroelectronics S,r.l.
- Microelectromechanical sensor device with active offset compensation3 Feb 2026US 12,540,952 B2STMicroelectronics S,r.l.
- Torsion spring element20 Jan 2026US 12,528,695 B2Northrop Grumman LITEF GmbH
- Micromechanical comb structure made of glass, and associated method of use1 Jan 2026US 2026/0001808 A1Lpkf Laser & Electronics AG
- Microelectromechanical motion sensor device having a single proof mass5 Jun 2025US 2025/0178885 A1STMicroelectronics International N. V.
- Method for fabricating micromechanical arm array in micro-electromechanical system (mems) actuators24 Apr 2025US 2025/0132695 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Microelectromechanical accelerometer with force feedback loop28 Nov 2024US 2024/0391757 A1STMicroelectronics International N. V.
- Mems, method of manufacturing an mems and method of configuring an mems21 Mar 2024US 2024/0092633 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Most cited
By later US patents
- Compound stage MEM actuator suspended for multidimensional motion127US 5,536,988 ACornell Research Foundation, Inc. · 1996
- Acceleration sensor and manufacturing method for the same55US 6,772,632 B2Wacoh Corporation · 2004
- System and method for constraining totally released microcomponents41US 6,677,225 B1Zyvex Corporation · 2004
- Compound stage MEM actuator suspended for multidimensional motion39US 5,726,073 ACornell Research Foundation, Inc. · 1998
- 6-axis electromagnetically-actuated meso-scale nanopositioner39US 7,557,470 B2Massachusetts Institute of Technology · 2009