MEMS die and MEMS-based vibration sensor

A microelectromechanical systems (MEMS) die comprising:

• a proof mass having an aperture disposed through a geometric center of the proof mass;
• an anchor disposed within the aperture;
• three or more arms extending from the anchor;
• and
• three or more resilient members, wherein each of the resilient members is a looped or folded spring, each resilient member connecting the proof mass to an arm of the three or more arms;
• and
• further comprising an electrode, wherein the electrode and the proof mass form a parallel capacitor.

A microelectromechanical systems (MEMS) die comprising:

• a proof mass having an aperture disposed through a geometric center of the proof mass;
• an anchor disposed within the aperture;
• four or more rigid arms extending from the anchor;
• and
• four or more resilient members;
• wherein the proof mass, the four or more resilient members, and the four or more rigid arms constitute portions of an etched layer;
• and
• wherein each of the four or more resilient members is a looped or folded spring, each resilient member connecting the proof mass to a rigid arm of the four or more rigid arms;
• and
• further comprising an electrode, wherein the electrode and the proof mass form a parallel capacitor.