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AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsAnton MELNIKOV, Jörg AMELUNG, Bert KAISER, Michael STOLZ
Estimating the term…
An MEMS has a substrate and a cavity arranged in the substrate. A movable element is arranged in the cavity, configured to interact with a fluid arranged in the cavity, wherein a movement of the fluid and a movement of the movable element are causally related. A first opening which connects the cavity to an environment of the substrate causes a first phase offset of a first periodic oscillation which is causally related to the movement of the movable element when passing through the first opening. A second opening which connects the cavity to the environment of the substrate causes a second phase offset, different from the first phase offset, of a second periodic oscillation which is causally related to the movement of the movable element when passing through the second opening.
An MEMS comprising:
A method of producing an MEMS, comprising:
Dependencies are inferred from the claim text.