Torsion spring element

A torsion spring element rotatably connected to a substrate and suitable for use in micro-electro-mechanical devices, wherein

• the torsion spring element can be twisted relative to the substrate, as well as moved linearly relative to the substrate;
• the torsion spring element is designed in one piece and comprises:
• a frame structure;
• an anchor structure preferably arranged within the frame structure;
• and
• spring structures connecting the anchor structure to the frame structure;
• the anchor structure connects the spring structures and the frame structure to the substrate;
• the frame structure, with deformation of the spring structures, moves as a whole relative to the anchor structure to produce rotational movements and linear movements of the torsion spring element relative to the substrate;
• and
• the spring structure has at least one pairing of two bending beam springs which extend from the anchor structure at an angle not equal to 0°, each have a kink, converge towards each other after the kink, meet at the frame structure, and are connected to the frame structure at that point.