Microelectromechanical motion sensor device having a single proof mass

A device, comprising:

• a base substrate having a first surface;
• and
• a sensing structure on the first surface, the sensing structure including:
• a frame element with a cavity extending from the first surface of the base substrate partially through the frame element along a first direction;
• a mobile mass in the cavity having a first surface opposite a second surface, the second surface of the base substrate being physically separated from the first surface of the mobile mass, the mobile mass being physically separated from a plurality of internal sidewalls of the cavity;
• an elastic supporting arrangement extending along a first plane transverse to the first direction, the elastic supporting arrangement suspending the mobile mass away from the first surface;
• and
• a coupling element directly coupled directly to the elastic supporting arrangement, physically separating the elastic supporting arrangement from the mobile mass along the first direction.

A device, comprising:

• a base substrate having a first surface;
• and
• a sensing structure on the first surface, the sensing structure including:
• a frame element with a cavity extending from the first surface of the base substrate partially through the frame element along a first direction;
• a mobile mass in the cavity, physically separated from the first surface and from a plurality of internal sidewalls of the cavity;
• a plurality of elastic elements extending along a first plane transverse to the first direction, the plurality of elastic elements suspending the mobile mass away from the first surface along the first direction;
• a plurality of anchors, each coupled between a respective one of the plurality of elastic elements and the frame element;
• a coupling element directly coupled directly to the plurality of elastic elements, the coupling element physically separating the plurality of elastic elements from the mobile mass along the first direction;
• and
• a first plurality of electrical coupling elements extending through the frame element along the first direction, the first plurality of electrical coupling elements being coupled between a respective anchor of the plurality of anchors and the first surface of the base substrate.