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US 7,557,470 B2Granted
6-axis electromagnetically-actuated meso-scale nanopositioner
AssigneeMassachusetts Institute of Technology
InventorsMartin L. Culpepper, Dariusz Golda
Life of this patent
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Abstract
A MEMS actuator includes a coil stack in the form of microfabricated, electrically conductive first and second superposed layers. A magnet array is superposed in magnetic communication with the coil stack, with first and second coils being selectively, electrically actuatable to generate relative movement between the coil stack and the magnet array both in-plane and out-of-plane. In various embodiments, a plurality of the actuators are integrally coupled to a microfabricated compliant mechanism to provide a high bandwidth, six degree of freedom nanopositioner.
Claims26
An electromagnetically actuated microfabricated nanopositioner comprising:
- (a) a microfabricated compliant mechanism including:
- a stage;
- a support;
- a plurality of flexures coupled to said stage and to said support;
- a plurality of beams each coupled to at least one of said plurality of flexures;
- and
- said beams sized and shaped wherein displacement thereof generates a displacement of said stage relative to said support;
- said compliant mechanism being substantially planar to define in-plane directions substantially parallel thereto;
- and
- (b) a plurality of actuators respectively coupled to said plurality of beams, each of said actuators including:
- at least one first coil in the form of a microfabricated, electrically conductive first layer substantially parallel to said compliant mechanism;
- at least one second coil in the form of a microfabricated electrically conductive second layer superposed with said first coil to form a coil stack;
- and
- a magnet array disposed in magnetic communication with said coil stack;
- said first and second coils being selectively, electrically actuatable to generate relative movement
- between said coil stack and said magnet array both in-plane and out-of-plane;
- (c) wherein said stage is configured for controlled movement with 6 degrees of freedom.
14 more elements
A MEMS nanopositioner comprising:
- (a) a plurality of MEMS actuators including:
- at least one first coil in the form of a microfabricated, electrically conductive first layer;
- at least one second coil in the form of a microfabricated electrically conductive second layer, said second coil being superposed with said first coil to form a coil stack;
- said layers being substantially planar to define in-plane directions parallel thereto;
- and
- a magnet array superposed, in magnetic communication, with said coil stack;
- said first and second coils being selectively, electrically actuatable to generate relative movement between said coil stack and said magnet array both in-plane and out-of-plane;
- (b) a microfabricated compliant mechanism including
- a stage;
- a support;
- a plurality of flexures coupled to said stage and to said support;
- a plurality of beams each coupled to at least one of said plurality of flexures;
- said beams sized and shaped wherein displacement thereof generates a displacement of said stage relative to said support;
- said compliant mechanism being substantially planar extending in-plane with said coils;
- and
- said plurality of actuators respectively coupled to said plurality of beams;
- and
- (c) wherein said stage is configured for controlled movement with 6 degrees of freedom.
15 more elements
A method of effecting a MEMS actuation, said method comprising:
- (a) providing at least one actuator having:
- at least one first coil in the form of a microfabricated, electrically conductive first layer;
- at least one second coil in the form of a microfabricated electrically conductive second layer, said second coil being superposed with said first coil to form a coil stack;
- said layers being substantially planar to define in-plane directions parallel thereto;
- and
- a magnet array superposed, in magnetic communication, with said coil stack;
- (b) selectively, electrically actuating the first and second coils to generate relative movement between the coil stack and the magnet array both in-plane and out-of-plane;
- (c) providing a microfabricated compliant mechanism including:
- a stage;
- a support;
- a plurality of flexures coupled to said stage and to said support;
- a plurality of beams each coupled to at least one of said plurality of flexures;
- said beams sized and shaped wherein displacement thereof generates a displacement of said stage relative to said support;
- said compliant mechanism being substantially planar, extending in-plane;
- and
- a plurality of said actuators respectively coupled to said plurality of beams;
- and
- (d) selectively, electrically actuating the first and second coils of each of said actuators to generate controlled movement of said stage with 6 degrees of freedom.
15 more elements
Dependencies are inferred from the claim text.