B81B 2203/053
Translation according to an axis perpendicular to the substrate
B81B2203/053 (Translation according to an axis perpendicular to the substrate) appears on 278 US grants and 309 published applications in this corpus.
Search patents in B81B- Granted patents
- 278
- Published applications
- 309
- Assignees
- 133
- Inventors
- 617
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 4 | 1 |
| 2002 | 10 | 13 |
| 2003 | 9 | 12 |
| 2004 | 16 | 11 |
| 2005 | 5 | 4 |
| 2006 | 4 | 1 |
| 2007 | 0 | 12 |
| 2008 | 0 | 6 |
| 2009 | 8 | 8 |
| 2010 | 10 | 9 |
| 2011 | 9 | 11 |
| 2012 | 7 | 9 |
| 2013 | 12 | 10 |
| 2014 | 11 | 8 |
| 2015 | 6 | 6 |
| 2016 | 7 | 12 |
| 2017 | 8 | 16 |
| 2018 | 12 | 18 |
| 2019 | 16 | 13 |
| 2020 | 20 | 25 |
| 2021 | 16 | 33 |
| 2022 | 16 | 13 |
| 2023 | 17 | 18 |
| 2024 | 20 | 11 |
| 2025 | 15 | 20 |
| 2026 | 10 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Semiconductor device18 Aug 2026US 12,709,537 B2Infineon Technologies AG
- Micromechanical z-acceleration sensor28 Apr 2026US 12,612,302 B2Robert Bosch GmbH
- Low-impact out-of-plane motion limiter MEMS device14 Apr 2026US 12,600,620 B2Murata Manufacturing Co., Ltd.
- Low voltage electrostatic mems actuators for large angle tip, tilt, and piston beamsteering31 Mar 2026US 12,589,986 B2The United States of America as represented by the Secretary of the Air Force
- MEMS optical microphone24 Mar 2026US 12,583,737 B2Aac Acoustic Technologies (Shenzhen) Co., Ltd.
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Microelectromechanical device with recovery from stiction conditions1 Oct 2026US 2026/0296874 A1STMicroelectronics International N. V.
- Asic capped mems device20 Aug 2026US 2026/0242209 A1Murata Manufacturing Co., Ltd.
- Bumpstop process for a motion sensor21 May 2026US 2026/0138865 A1InvenSense, Inc.
- Microelectromechanical component and microelectromechanical inertial sensor30 Apr 2026US 2026/0116739 A1
Most cited
By later US patents
- Electrostatic/pneumatic actuators for active surfaces213US 6,215,221 B1Honeywell International Inc. · 2001
- Vertical comb drive actuated deformable mirror device and method166US 6,384,952 B1Mems Optical, Inc. · 2002
- Electrostatic/pneumatic actuators for active surfaces132US 6,288,472 B1Honeywell International Inc. · 2001
- Multi-directional thermal actuator129US 6,438,954 B13M Innovative Properties Company · 2002
- Compound stage MEM actuator suspended for multidimensional motion127US 5,536,988 ACornell Research Foundation, Inc. · 1996