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US 12,709,537 B2Granted
Semiconductor device
AssigneeInfineon Technologies AG
InventorsAndreas Bogner, Christian Bretthauer, Abhiraj Basavanna
Life of this patent
Estimating the term…
Abstract
A semiconductor device has a deformable membrane, e.g., for the measurement of at least one of an acceleration, a vibration, or a pressure. The membrane has a supporting connection with a support structure which includes at least one elastic supporting connection. Also disclosed are a sensor device including the semiconductor device along with methods for manufacturing the semiconductor device and the sensor device.
Claims20
A semiconductor device comprising:
- a deformable membrane with a membrane stiffness;
- a support structure;
- at least one electric contact configured to obtain an electric signal indicative of a deformation of the deformable membrane;
- and
- at least one mass element attached to, or integral with, the deformable membrane,
- wherein the deformable membrane comprises a membrane border that is partially in direct contact with the support structure and partially separated by at least one aperture from the support structure.
3 more elements
A sensor device comprising:
- a semiconductor device including:
- a deformable membrane with a membrane stiffness;
- a support structure;
- at least one electric contact configured to obtain an electric signal indicative of a deformation of the deformable membrane;
- and
- at least one mass element attached to, or integral with, the deformable membrane,
- wherein the deformable membrane comprises a membrane border that is partially in direct contact with the support structure and partially separated by at least one aperture from the support structure;
- analog-to-digital circuitry configured to convert the electric signal indicative of the deformation of the deformable membrane into a digital signal;
- and
- at least one digital measurer configured to obtain, from the digital signal, a measurement of at least one pressure, vibration, or acceleration.
7 more elements
A semiconductor device comprising:
- a deformable membrane with a uniform thickness;
- a support structure;
- at least one electric contact configured to obtain an electric signal indicative of a deformation of the deformable membrane;
- and
- at least one mass element attached to the deformable membrane,
- wherein the deformable membrane comprises a membrane border that is partially in direct contact with the support structure and partially separated by at least one aperture from the support structure.
3 more elements
Dependencies are inferred from the claim text.