Vertical comb drive actuated deformable mirror device and method

A deformable mirror comprising:

• a vertical electrostatic comb drive including a first array of stationary elements and a second array of moving elements correspondingly interspersed with said first array;
• a reflective surface attached to said second array;
• a layer covering tops of elements of said second array;
• and
• a spring for suspending said first array relative to said second array, said spring being attached to said layer.

A deformable mirror comprising:

• a vertical electrostatic comb drive;
• a reflective surface attached to said vertical comb drive, wherein said vertical comb drive comprises a first array of stationary elements and a second array of moving elements correspondingly interspersed with said first array, said reflective surface being attached to said second array and defining a plane;
• said vertical comb drive, when actuated, displacing said surface in a direction orthogonal to the plane thereof;
• a layer covering tops of elements of said second array;
• and
• a post attaching said layer to said reflective surface.

A deformable mirror comprising:

• a vertical electrostatic comb drive including an array of vertical comb actuators, wherein said vertical comb drive includes a first array of stationary elements and a second array of moving elements correspondingly interspersed with said first array;
• a reflective surface attached to said vertical comb drive, said reflective surface being attached to said second array and defining a plane, said reflective surface being displaced in a direction orthogonal to the plane thereof when said vertical comb drive is actuated;
• and
• springs for individually suspending each of said second array of each actuator in said array.

A displaceable surface comprising:

• a vertical electrostatic comb drive;
• a surface attached to said vertical comb drive and defining a plane;
• and
• a spring for biasing said vertical comb drive to maintain said surface in an original position absent application of a voltage to said vertical comb drive;
• said vertical comb drive, when actuated, displacing said surface in a direction orthogonal to the plane thereof.

A displaceable surface comprising:

• a vertical electrostatic comb drive;
• a surface attached to said vertical comb drive, wherein said vertical comb drive comprises a first array of stationary elements and a second array of moving elements correspondingly interspersed with said first array, said surface defining a plane and being attached to said second array, said surface being displaced in a direction orthogonal to the plane thereof when said vertical electrostatic comb drive is actuated;
• a layer covering tops of elements of said second array;
• and
• a spring for suspending said first array relative to said second array, said spring being attached to said layer.

A displaceable surface comprising:

• a vertical electrostatic comb drive;
• a surface attached to said vertical comb drive, wherein said vertical comb drive comprises a first array of stationary elements and a second array of moving elements correspondingly interspersed with said first array, said surface defining a plane and being attached to said second array, said surface being displaced in a direction orthogonal to the plane thereof when said vertical electrostatic comb drive is actuated;
• a layer covering tops of elements of said second array;
• and
• a post attaching said layer to said surface.

A displaceable surface comprising:

• a vertical electrostatic comb drive including an array of vertical comb actuators;
• a surface attached to said vertical comb drive, wherein said vertical comb drive comprises a first array of stationary elements and a second array of moving elements correspondingly interspersed with said first array, said surface defining a plane and being attached to said second array, said surface being displaced in a direction orthogonal to the plane thereof when said vertical electrostatic comb drive is actuated;
• and
• springs for individually suspending each of said second array of each actuator in said array.