B81B 2203/0323
Grooves
B81B2203/0323 (Grooves) appears on 406 US grants and 535 published applications in this corpus.
Search patents in B81B- Granted patents
- 406
- Published applications
- 535
- Assignees
- 277
- Inventors
- 1,198
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 7 | 0 |
| 2001 | 7 | 2 |
| 2002 | 10 | 14 |
| 2003 | 6 | 14 |
| 2004 | 12 | 21 |
| 2005 | 13 | 13 |
| 2006 | 10 | 24 |
| 2007 | 15 | 20 |
| 2008 | 8 | 10 |
| 2009 | 11 | 15 |
| 2010 | 12 | 14 |
| 2011 | 13 | 29 |
| 2012 | 7 | 14 |
| 2013 | 14 | 17 |
| 2014 | 17 | 13 |
| 2015 | 18 | 15 |
| 2016 | 11 | 11 |
| 2017 | 16 | 26 |
| 2018 | 7 | 21 |
| 2019 | 18 | 20 |
| 2020 | 17 | 35 |
| 2021 | 28 | 34 |
| 2022 | 25 | 42 |
| 2023 | 23 | 34 |
| 2024 | 24 | 33 |
| 2025 | 36 | 25 |
| 2026 | 16 | 19 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Micro-acoustic resonator springy anchor based on offset acoustic reflector trenches21 Jul 2026US 12,686,611 B2Texas Instruments Incorporated
- Micro-electromechanical system (MEMS) structure and mems microphone comprising same14 Jul 2026US 12,679,720 B2Memsensing Microsystems (Suzhou, China) Co., Ltd.
- Micro-electro-mechanical system package and fabrication method thereof14 Jul 2026US 12,679,722 B2Vanguard International Semiconductor Corporation
- Micro-fluidic chip, library preparation chip and method for controlling and driving droplet30 Jun 2026US 12,667,841 B2Beijing BOE Sensor Technology Co., Ltd.
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Method of fabricating micro-electro-mechanical system package24 Sep 2026US 2026/0285676 A1Vanguard International Semiconductor Corporation
- Device and method for manufacturing solid fuel microthrusters using only pcb-mems technology10 Sep 2026US 2026/0264889 A1Universidad de Sevilla
- Method of manufacturing a microfluidic architecture27 Aug 2026US 2026/0249522 A1Unhlndr LTD
- Manufacturing process of a microelectromechanical system with multiple cavities at different pressures and related microelectromechanical system20 Aug 2026US 2026/0242215 A1STMicroelectronics International N. V.
Most cited
By later US patents
- Method for forming micro cavity560US 6,342,427 B12002
- Production of microstructures for use in assays174US 6,440,645 B1Cambridge Sensors Limited · 2002
- Devices having vertically-disposed nanofabric articles and methods of making the same152US 6,924,538 B2Nantero, Inc. · 2005
- Microfluidic device with controlled substrate conductivity125US 7,195,986 B1Caliper Life Sciences, Inc. · 2007
- Micromachined capillary electrophoresis device105US 5,824,204 AIC Sensors, Inc. · 1998