Micro-acoustic resonator springy anchor based on offset acoustic reflector trenches
AssigneeTexas Instruments Incorporated
InventorsHakhamanesh Mansoorzare, Ting-Ta Yen, Yao Yu
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Abstract
A circuit includes: integrated circuit (IC) layers; a cavity formed in at least one of the IC layers; and a micro-acoustic resonator suspended in the cavity by an anchor. The anchor includes: a bridge portion coupled to the micro-acoustic resonator and extending over the cavity; a first acoustic reflector portion adjacent the bridge portion, extending over the cavity, and oriented differently than the bridge portion; and a second acoustic reflector portion adjacent the first acoustic reflector portion, extending over the cavity, and oriented differently than the first acoustic reflector portion.
Claims23
An apparatus, comprising:
- a first layer including a cavity;
- and
- a second layer on the first layer and including:
- an opening over the cavity;
- an anchor on a side of the opening, the anchor being over the cavity and including a first segment and a second segment;
- and
- a device in the opening and over the cavity and coupled to the anchor.
An apparatus comprising:
- a resonator portion over a cavity;
- an anchor over the cavity, the anchor including trenches;
- and
- a bridge over the cavity and coupled between the resonator and and edge of the anchor.
A method comprising:
- forming a first layer including a cavity;
- forming a second layer on the first layer;
- forming a resonator in the second layer and over the cavity;
- forming an anchor including trenches in the second layer and over the cavity, the anchor having an edge;
- and
- forming a bridge over the cavity and between the resonator and the edge.
Dependencies are inferred from the claim text.