Micro-electromechanical system (MEMS) structure and mems microphone comprising same
AssigneeMemsensing Microsystems (Suzhou, China) Co., Ltd.
InventorsGenlan Rong, Kai Sun, Yanzi Meng, Wei Hu
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Abstract
Disclosed are a micro-electromechanical system (MEMS) structure and an MEMS microphone comprising same. The MEMS structure comprises a back plate; and a diaphragm located on one side of the back plate, wherein the diaphragm and the back plate forms a variable capacitor, the diaphragm comprises multiple first through holes and air release structures respectively corresponding to the first through holes, and the diaphragm further comprises one or more second through holes penetrating through the diaphragm.
Claims19
A micro-electromechanical system structure, wherein the micro-electromechanical system structure comprises:
- a back plate;
- a diaphragm, the diaphragm is located on one side of the back plate, wherein the diaphragm and the back plate form a variable capacitor, the diaphragm comprises a plurality of first through holes and one or more air release structures corresponding to the first through holes;
- wherein the diaphragm further comprises one or more second through holes penetrating through the diaphragm;
- wherein the second through hole is located at a center of the diaphragm and serves as a main air release channel;
- the first through hole is located around the diaphragm and serves as an auxiliary air release channel, wherein a gap is existed between the air release structure and the first through hole;
- and the air release structure is configured to deform based on external sound pressure to expand the gap between the air release structure and the first through hole.
A MEMS microphone, wherein the MEMS microphone comprises a micro-electromechanical system structure, comprising:
- a back plate;
- a diaphragm, the diaphragm is located on one side of the back plate, wherein the diaphragm and the back plate form a variable capacitor, the diaphragm comprises a plurality of first through holes and one or more air release structures corresponding to the first through holes;
- wherein the diaphragm further comprises one or more second through holes penetrating through the diaphragm;
- wherein the second through hole is located at a center of the diaphragm and serves as a main air release channel;
- the first through hole is located around the diaphragm and serves as an auxiliary air release channel, wherein a gap is existed between the air release structure and the first through hole;
- and the air release structure is configured to deform based on external sound pressure to expand the gap between the air release structure and the first through hole.
Dependencies are inferred from the claim text.