B81B 2203/0154
Torsion bars
B81B2203/0154 (Torsion bars) appears on 135 US grants and 183 published applications in this corpus.
Search patents in B81B- Granted patents
- 135
- Published applications
- 183
- Assignees
- 86
- Inventors
- 314
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 0 | 1 |
| 2003 | 0 | 0 |
| 2004 | 1 | 1 |
| 2005 | 1 | 3 |
| 2006 | 1 | 1 |
| 2007 | 2 | 2 |
| 2008 | 2 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 1 | 6 |
| 2013 | 2 | 5 |
| 2014 | 4 | 7 |
| 2015 | 4 | 9 |
| 2016 | 8 | 9 |
| 2017 | 8 | 6 |
| 2018 | 5 | 5 |
| 2019 | 7 | 9 |
| 2020 | 11 | 17 |
| 2021 | 8 | 29 |
| 2022 | 9 | 11 |
| 2023 | 23 | 16 |
| 2024 | 17 | 13 |
| 2025 | 16 | 20 |
| 2026 | 5 | 10 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Accelerometer contact microphones and methods thereof16 Jun 2026US 12,659,653 B2Georgia Tech Research Corporation
- Early-impact out-of-plane motion limiter for MEMS device14 Apr 2026US 12,600,619 B2Murata Manufacturing Co., Ltd.
- Low-impact out-of-plane motion limiter MEMS device14 Apr 2026US 12,600,620 B2Murata Manufacturing Co., Ltd.
- MEMS mirror device and distance measuring apparatus3 Feb 2026US 12,541,091 B2Mitsubishi Electric Corporation
- Spring assembly, scanning mirror, and lidar system11 Jun 2026US 2026/0159373 A1inSync Resonance Inc
- Connection assembly for mems, scanning mirror, and lidar system11 Jun 2026US 2026/0159374 A1inSync Resonance Inc
- High-Frequency BIAXIAL Bi-Resonant Microelectromechanical Mirror Structure4 Jun 2026US 2026/0152383 A1STMicroelectronics International N. V.
- Microelectromechanical device4 Jun 2026US 2026/0152386 A1Zilltek Technology Corp.
- Microelectromechanical array4 Jun 2026US 2026/0152387 A1Zilltek Technology Corp.
Most cited
By later US patents
- MEMS multi-axis gyroscope with central suspension and gimbal structure30US 8,813,564 B2Fairchild Semiconductor Corporation · 2014
- Actuator device24US 10,589,985 B2Hamamatsu Photonics K.K. · 2020
- Actuator device and mirror drive device24US 9,729,038 B2Hamamatsu Photonics K.K. · 2017
- MEMS multi-axis gyroscope Z-axis electrode structure15US 9,278,845 B2Fairchild Semiconductor Corporation · 2016
- Micro-oscillating element provided with torsion bar14US 7,031,041 B2Fujitsu Limited · 2006