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US 7,031,041 B2Granted
Micro-oscillating element provided with torsion bar
AssigneeFujitsu Limited
InventorsXiaoyu Mi, Osamu Tsuboi, Satoshi Ueda, Ippei Sawaki
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Abstract
A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).
Claims18
A micro-oscillating element, comprising:
- a frame;
- and
- an oscillating member connected to the frame via connectors;
- wherein each of the connectors includes two torsion bars having an interval in a widthwise direction, the interval becoming larger toward the oscillating member and gradually decreasing toward the frame, each of the torsion bars being provided with rigidity adjustment means.
1 more element
A micro-oscillating element, comprising:
- an inner frame;
- an oscillating member connected to the inner frame via inner connectors, each of the inner connectors including at least one inner torsion bar provided with rigidity adjustment means and
- an outer frame connected to the inner frame via an outer connector, the outer connector including at least one outer torsion bar provided with rigidity adjustment means.
Dependencies are inferred from the claim text.