Microelectromechanical device

A microelectromechanical device, comprising:

• a substrate having a height direction and an extension direction that is perpendicular to the height direction;
• a dielectric layer disposed on the substrate;
• two conductive anchor components disposed on the substrate through the dielectric layer, wherein the two conductive anchor components are spaced apart from each other along the extension direction;
• and
• a microelectromechanical structure and at least one elastic thermistor, wherein the at least one elastic thermistor includes a fixed portion and an elastic portion connected to the fixed portion, the fixed portion is connected to one of the two conductive anchor components, the elastic portion is connected to one of two ends of the microelectromechanical structure, and another one of the two ends of the microelectromechanical structure is directly or indirectly connected to another one of the two conductive anchor components, and wherein the microelectromechanical structure and the substrate are spaced apart from each other by the at least one elastic thermistor, so as to form a first predetermined gap along the height direction.