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US 9,278,845 B2Granted
MEMS multi-axis gyroscope Z-axis electrode structure
AssigneeFairchild Semiconductor Corporation
InventorCenk Acar
Life of this patent
Estimating the term…
Abstract
Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
Claims15
A microelectromechanical die for sensing motion, comprising:
- a substrate;
- a proof-mass coupled to the substrate at an anchor, the proof-mass including:
- a first portion moveable with respect to the anchor, the first portion including a first proof-mass electrode;
- and
- a second portion, opposite the first portion with respect to the anchor, the second portion moveable with respect to the anchor and the first portion, the second portion including a second proof-mass electrode;
- a first stator coupled to the substrate and including a first stator electrode extending alongside the first proof-mass electrode of the first portion of the proof-mass to form a first electrode pair;
- and
- a second stator coupled to the substrate and including a second stator electrode, opposite the first stator electrode, and extending alongside the second proof-mass electrode of the second portion of the proof-mass to form a second electrode pair;
- wherein in a first vibratory mode, in which the first portion of the proof-mass is to move away from the second portion of the proof-mass, the proof-mass, the first stator electrode, and the second stator electrode are arranged such that a distance between electrodes of the first electrode pair is inversely proportional to a distance between electrodes of the second electrode pair.
6 more elements
A method for sensing motion with a microelectromechanical die, comprising:
- exciting vibration of a first portion of a proof-mass and a second portion of the proof-mass so the first portion and the second portion move together and apart in synchrony, toward a respective first stator and second stator;
- and
- sensing motion of the die along a direction extending between the first portion of the proof-mass and the second portion of the proof-mass by measuring a differential in respective capacitance values for the first stator and the second stator.
Dependencies are inferred from the claim text.