High-Frequency BIAXIAL Bi-Resonant Microelectromechanical Mirror Structure

A microelectromechanical mirror structure, comprising:

• a mobile mass, configured to be actuated around a first rotation axis, with a first resonant scanning mode at a first resonance frequency around a second rotation axis, with a second resonant scanning mode at a second resonance frequency greater than the first resonance frequency;
• a first frame suspended and surrounding the mobile mass and elastically coupled to the mobile mass by a first torsional elastic element and a second torsional elastic element aligned on opposite sides of the mobile mass along the second rotation axis;
• a second frame suspended and arranged externally around the first frame and elastically coupled to the first frame by a third torsional elastic element and a fourth torsional elastic element aligned along the first rotation axis;
• first piezoelectric actuators, arranged on the second frame and configured to actuate the first resonant scanning mode of the mobile mass;
• and
• an actuation structure arranged externally to the second frame and carrying second piezoelectric actuators configured to actuate the second resonant scanning mode of the mobile mass.