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US 8,813,564 B2Granted
MEMS multi-axis gyroscope with central suspension and gimbal structure
AssigneeFairchild Semiconductor Corporation
InventorCenk Acar
Life of this patent
Estimating the term…
Abstract
Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
Claims15
A microelectromechanical die for sensing motion, comprising:
- a fixed portion;
- an anchor coupled to the fixed portion;
- a first nonlinear suspension member coupled to anchor on a first side of the anchor;
- a second nonlinear suspension member coupled to the anchor on the first side of the anchor, the second nonlinear suspension member having a shape and location mirroring the first nonlinear suspension member about an anchor bisecting plane, wherein the first nonlinear suspension member and the second nonlinear suspension member are part of an inner gimbal of the microelectromechanical die;
- and
- a proof-mass that is planar, the proof-mass suspended by a first suspension member disposed on a first side of the anchor and a second suspension member disposed on a second side of the anchor opposite the first side, with the die defining a first gap extending along a first side of the anchor and a second gap extending along a second side of the anchor, opposite the first side, with each of the first gap and the second gap extending between the inner gimbal and the proof-mass,
- wherein the inner gimbal is supported at least in part by the first nonlinear suspension member and the second nonlinear suspension member such that the proof-mass is rotatable about the anchor and is slideable in a plane parallel to the fixed portion.
4 more elements
A method for sensing motion with a microelectromechanical die, comprising:
- rotating a proof-mass with respect to an inner gimbal that is coupled to a substrate via an anchor, by:
- deforming a first nonlinear suspension member, that couples the proof-mass to a first side of the anchor, out-of-plane of the plane of the proof-mass, above the proof-mass;
- and
- deforming a second nonlinear suspension member, that couples the proof-mass to the first side of the anchor, out-of-plane of the plane of the proof-mass on an opposite first side of the plane of the proof-mass, below the proof-mass;
- and
- deforming a first suspension member, that supports the proof-mass and that is disposed on a first side of the anchor, and a second suspension member, that is disposed on a second side of the anchor opposite the first side, with the die defining a first gap extending along a first side of the anchor and a second gap extending along a second side of the anchor, opposite the first side, with each of the first gap and the second gap extending between the inner gimbal and the proof-mass.
3 more elements
Dependencies are inferred from the claim text.