Connection assembly for mems, scanning mirror, and lidar system

A scanning mirror, comprising torsion springs arranged in an array on a MEMS, a connection assembly being arranged between any two adjacent torsion springs of the torsion springs, the two adjacent torsion springs being connected by the connection assembly, and in response to the two adjacent torsion springs being twisted, the connection assembly being stretched to provide a torque that is non-linearly recovered, wherein:

• each of the torsion springs comprises two fixing components arranged opposite to each other and a beam structure arranged between the two fixing components, the beam structure being provided with a first connection plate, the two ends of the connection assembly in a stretching direction being connected to two first connection plates of the two adjacent torsion springs, respectively, and a reflection mirror being arranged at a surface of the first connection plate;
• each of the two first connection plates has an opening formed at an end close to a connection assembly, the connection assembly comprising two fixing piles arranged opposite to each other, at least one connection beam arranged between the two fixing piles, and a connection rod;
• wherein each of the at least one connection beam at least comprising a first bending portion, the connection rod being connected to the two first connection plates arranged at two sides of the opening by the two connection beams, respectively;
• and
• the scanning mirror further comprises a drive component configured to drive the torsion springs arranged in the array to twist synchronously.