Y10S 438/913
Diverse treatments performed in unitary chamber
Y10S438/913 (Diverse treatments performed in unitary chamber) appears on 130 US grants and 64 published applications in this corpus.
Search patents in Y10S- Granted patents
- 130
- Published applications
- 64
- Assignees
- 65
- Inventors
- 247
- Latest grant
- 7 Jul 2015
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 4 | 0 |
| 1992 | 2 | 0 |
| 1993 | 4 | 0 |
| 1994 | 6 | 0 |
| 1995 | 10 | 0 |
| 1996 | 4 | 0 |
| 1997 | 1 | 0 |
| 1998 | 4 | 0 |
| 1999 | 6 | 0 |
| 2000 | 3 | 0 |
| 2001 | 5 | 3 |
| 2002 | 13 | 15 |
| 2003 | 12 | 7 |
| 2004 | 10 | 9 |
| 2005 | 9 | 5 |
| 2006 | 4 | 3 |
| 2007 | 0 | 2 |
| 2008 | 1 | 5 |
| 2009 | 0 | 1 |
| 2010 | 4 | 2 |
| 2011 | 8 | 3 |
| 2012 | 3 | 5 |
| 2013 | 5 | 2 |
| 2014 | 1 | 1 |
| 2015 | 1 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Methods for discretized processing and process sequence integration of regions of a substrate7 Jul 2015US 9,076,716 B2Intermolecular, Inc.
- Methods for discretized processing and process sequence integration of regions of a substrate15 Apr 2014US 8,697,606 B2Intermolecular, Inc.
- Methods for discretized processing and process sequence integration of regions of a substrate17 Dec 2013US 8,610,121 B2Intermolecular, Inc.
- Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device28 May 2013US 8,448,599 B2Hitachi Kokusai Electric Inc.
- Advanced mixing system for integrated tool having site-isolated reactors9 Apr 2013US 8,414,703 B2Intermolecular, Inc.
- Methods for Discretized Processing and Process Sequence Integration of Regions of a Substrate8 Oct 2015US 2015/0287616 A1Intermolecular, Inc.
- Methods for Discretized Processing and Process Sequence Integration of Regions of a Substrate13 Mar 2014US 2014/0070213 A1Intermolecular, Inc.
- Advanced Mixing System for Integrated Tool Having Site-Isolated Reactors14 Mar 2013US 2013/0065796 A1Intermolecular, Inc.
- Methods for discretized processing and process sequence integration of regions of a substrate7 Mar 2013US 2013/0056101 A1Intermolecular, Inc.
- Advanced mixing system for integrated tool having site-isolated reactors13 Sep 2012US 2012/0231975 A1Intermolecular, Inc.
Most cited
By later US patents
- Dry etching by alternately etching and depositing567US 4,985,114 AHitachi, Ltd. · 1991
- Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput555US 6,589,868 B2APPLIED Materials.Inc. · 2003
- Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus487US 6,828,235 B2Hitachi Kokusai Electric Inc. · 2004
- Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput483US 6,846,742 B2APPLIED Materials.Inc. · 2005
- Method of forming a thin film on surface of semiconductor substrate369US 5,407,867 AMitsubishki Denki Kabushiki Kaisha · 1995