Methods for Discretized Processing and Process Sequence Integration of Regions of a Substrate
AssigneeIntermolecular, Inc.
InventorsThomas R. Boussie, Tony P. Chiang, Alexander Gorer, David E. Lazovsky
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Abstract
The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
Claims20
A method of conducting research on substrates, comprising:
- having a substrate partially processed in manufacturing tools,
- processing the substrate in a research tool using combinatorial techniques on different regions of the substrate, and
- having the substrate further processed in a manufacturing tool.
A semiconductor device prepared by a process, the process comprising:
- performing a process sequence on a substrate;
- wherein an order of unit processes in the process sequence is varied between regions of the substrate.
A semiconductor device prepared by a process comprising method operations of:
- isolating regions on a substrate;
- and
- processing the regions on the substrate in a combinatorial manner while providing uniform processing within the regions.
Dependencies are inferred from the claim text.