Methods for discretized processing and process sequence integration of regions of a substrate
AssigneeIntermolecular, Inc.
InventorsThomas R. Boussie, Tony P. Chiang, Alexander Gorer, David E. Lazovsky
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Abstract
The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
Claims20
A system for combinatorial processing of a plurality of regions on a substrate comprising:
- a first line and a second line,
- wherein the first line is operable for combinatorial processing of a plurality of discrete regions on a substrate using locally uniform processing,
- wherein the combinatorial processing comprises varying at least one of a material, a unit process, a processing condition, or a process sequence in a combinatorial manner among the plurality of regions;
- wherein each of the plurality of discrete regions is defined by a processing cell enclosing a corresponding discrete region;
- wherein a bottom surface of a side of the processing cell provides a seal against the surface of the substrate;
- and
- wherein the processing cell includes a sealed upper surface coupled to the side surfaces to isolate processing regions defined above one of the discrete regions from an external environment;
- wherein the second line is operable for non-combinatorial processing in a substantially uniform manner across the plurality of discrete regions and areas between the plurality of discrete regions;
- and
- wherein the substrate can be moved between the first line and the second line for sequential processing.
A system for combinatorial processing of a plurality of regions on a substrate comprising:
- a first line and a second line,
- wherein the first line is operable for combinatorial processing of a plurality of discrete regions on a substrate using locally uniform processing,
- wherein the combinatorial processing comprises thin-film deposition techniques in combination with isolation or photolithographic techniques operable to deposit thin-films on predefined discrete regions on the substrate;
- wherein the combinatorial processing comprises varying at least one of a material, a unit process, a processing condition, or a process sequence in a combinatorial manner among the plurality of regions;
- wherein the second line is operable for non-combinatorial processing in a substantially uniform manner across the plurality of discrete regions and areas between the plurality of discrete regions;
- wherein the substrate can be moved between the first line and the second line for sequential processing;
- wherein each of the plurality of discrete regions is enclosed by a processing cell;
- wherein a bottom surface of a side of the processing cell provides a seal against the surface of the substrate;
- and
- wherein the processing cell includes a sealed upper surface coupled to the side surfaces to isolate a processing region above the discrete region from an external environment.
Dependencies are inferred from the claim text.