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US 8,414,703 B2Granted
Advanced mixing system for integrated tool having site-isolated reactors
AssigneeIntermolecular, Inc.
InventorsKurt H. Weiner, Tony P. Chiang, Aaron Francis, John Schmidt
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Abstract
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Claims18
An integrated processing system comprising:
- a full-wafer processing module;
- and
- a combinatorial processing module,
- wherein chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds,
- an output of each manifold of the set of the first manifolds being coupled to at least one mixing vessel,
- an output of the at least one mixing vessel feeding more than one second manifold of a set of second manifolds,
- an output of each manifold of the set of the second manifolds feeding one of a plurality of site-isolated reactors of the combinatorial processing module.
4 more elements
Dependencies are inferred from the claim text.