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US 2013/0065796 A1Published application
Advanced Mixing System for Integrated Tool Having Site-Isolated Reactors
AssigneeIntermolecular, Inc.
InventorsAaron T. Francis, Tony P. Chiang, John Schmidt, Kurt H. Weiner
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Abstract
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Claims11
A substrate processing system comprising:
- a fluid delivery system;
- a plurality of site-isolated reactors coupled to the fluid delivery system, the plurality of site-isolated reactors configured to receive chemicals from the fluid delivery system, the plurality of site-isolated reactors configured for independent control of chemical delivery and processing parameters used to effect site-isolated processing of a wafer;
- and
- a full wafer reactor coupled to the fluid delivery system, the full wafer reactor effecting full-wafer processing of the wafer, the full-wafer processing integrated with the site-isolated processing.
1 more element
Dependencies are inferred from the claim text.