Y10S 414/135
Associated with semiconductor wafer handling
Y10S414/135 (Associated with semiconductor wafer handling) appears on 3,036 US grants and 1,463 published applications in this corpus.
Search patents in Y10S- Granted patents
- 3,036
- Published applications
- 1,463
- Assignees
- 731
- Inventors
- 4,142
- Latest grant
- 23 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 9 | 0 |
| 1977 | 10 | 0 |
| 1978 | 5 | 0 |
| 1979 | 3 | 0 |
| 1980 | 8 | 0 |
| 1981 | 7 | 0 |
| 1982 | 6 | 0 |
| 1983 | 10 | 0 |
| 1984 | 16 | 0 |
| 1985 | 31 | 0 |
| 1986 | 32 | 0 |
| 1987 | 42 | 0 |
| 1988 | 58 | 0 |
| 1989 | 54 | 0 |
| 1990 | 52 | 0 |
| 1991 | 45 | 0 |
| 1992 | 27 | 0 |
| 1993 | 43 | 0 |
| 1994 | 50 | 0 |
| 1995 | 77 | 0 |
| 1996 | 71 | 0 |
| 1997 | 93 | 0 |
| 1998 | 111 | 0 |
| 1999 | 133 | 0 |
| 2000 | 193 | 0 |
| 2001 | 210 | 85 |
| 2002 | 210 | 178 |
| 2003 | 197 | 206 |
| 2004 | 183 | 147 |
| 2005 | 148 | 147 |
| 2006 | 111 | 118 |
| 2007 | 88 | 97 |
| 2008 | 80 | 118 |
| 2009 | 72 | 92 |
| 2010 | 133 | 60 |
| 2011 | 102 | 41 |
| 2012 | 79 | 51 |
| 2013 | 31 | 30 |
| 2014 | 59 | 23 |
| 2015 | 57 | 20 |
| 2016 | 19 | 8 |
| 2017 | 14 | 3 |
| 2018 | 11 | 6 |
| 2019 | 8 | 7 |
| 2020 | 10 | 9 |
| 2021 | 7 | 4 |
| 2022 | 4 | 3 |
| 2023 | 8 | 6 |
| 2024 | 4 | 3 |
| 2025 | 1 | 0 |
| 2026 | 4 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Process apparatus with on-the-fly substrate centering23 Jun 2026US 12,666,905 B2Brooks Automation US, LLC
- Transfer unit and substrate treatment apparatus including the same31 Mar 2026US 12,593,653 B2Semes Co., Ltd.
- End effector and substrate processing apparatus including end effector3 Feb 2026US 12,540,041 B2ASM IP Holding B. V.
- Tower lift, logistics system including the same, and transfer method using the same6 Jan 2026US 12,518,996 B2Semes Co., Ltd.
- Apparatus, system and method for providing an end effector16 Dec 2025US 12,496,733 B2Jabil Inc.
- Apparatus, system and method for providing an end effector21 May 2026US 2026/0138288 A1Jabil Inc.
- Apparatus, system and method for providing an end effector26 Dec 2024US 2024/0424688 A1Jabil Inc.
- Substrate support apparatus4 Jul 2024US 2024/0222177 A1Semes Co., Ltd.
- Transfer unit and substrate treatment apparatus including the same20 Jun 2024US 2024/0203776 A1Semes Co., Ltd.
- Process apparatus with on-the-fly substrate centering30 Nov 2023US 2023/0386879 A1Brooks Automation US, LLC
Most cited
By later US patents
- Multi-chamber integrated process system988US 4,951,601 AAPPLIED Materials.Inc. · 1990
- Compartnetalized substrate processing chamber732US 5,730,801 AAPPLIED Materials.Inc. · 1998
- Wafer processing cluster tool batch preheating and degassing apparatus663US 5,259,881 AMaterials Research Corporation · 1993
- Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber658US 6,315,512 B1Mattson Technology, Inc. · 2001
- Modular wafer transport and processing system655US 4,917,556 AVarian Associates, Inc. · 1990