Y10S 414/136
Including wafer orienting means
Official title: including wafer orienting means
Y10S414/136 (Including wafer orienting means) appears on 510 US grants and 225 published applications in this corpus.
Search patents in Y10S- Granted patents
- 510
- Published applications
- 225
- Assignees
- 203
- Inventors
- 872
- Latest grant
- 23 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 4 | 0 |
| 1986 | 2 | 0 |
| 1987 | 8 | 0 |
| 1988 | 12 | 0 |
| 1989 | 7 | 0 |
| 1990 | 8 | 0 |
| 1991 | 10 | 0 |
| 1992 | 2 | 0 |
| 1993 | 3 | 0 |
| 1994 | 8 | 0 |
| 1995 | 15 | 0 |
| 1996 | 15 | 0 |
| 1997 | 13 | 0 |
| 1998 | 18 | 0 |
| 1999 | 35 | 0 |
| 2000 | 43 | 0 |
| 2001 | 46 | 10 |
| 2002 | 40 | 29 |
| 2003 | 33 | 27 |
| 2004 | 27 | 19 |
| 2005 | 26 | 30 |
| 2006 | 16 | 23 |
| 2007 | 11 | 12 |
| 2008 | 14 | 18 |
| 2009 | 9 | 21 |
| 2010 | 21 | 7 |
| 2011 | 17 | 7 |
| 2012 | 16 | 10 |
| 2013 | 7 | 1 |
| 2014 | 6 | 2 |
| 2015 | 5 | 4 |
| 2016 | 2 | 0 |
| 2017 | 1 | 1 |
| 2018 | 0 | 0 |
| 2019 | 0 | 1 |
| 2020 | 2 | 0 |
| 2021 | 0 | 1 |
| 2022 | 0 | 0 |
| 2023 | 1 | 1 |
| 2024 | 0 | 1 |
| 2025 | 0 | 0 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Process apparatus with on-the-fly substrate centering23 Jun 2026US 12,666,905 B2Brooks Automation US, LLC
- Process apparatus with on-the-fly substrate centering30 May 2023US 11,664,259 B2Brooks Automation US, LLC
- Process apparatus with on-the-fly substrate centering29 Dec 2020US 10,879,101 B2Brooks Automation, Inc.
- Alignment apparatus29 Sep 2020US 10,790,179 B2SEMIgear, Inc.
- Apparatus, system, and methods for weighing and positioning wafers17 Oct 2017US 9,791,309 B2Microtronic, Inc.
- Substrate support apparatus4 Jul 2024US 2024/0222177 A1Semes Co., Ltd.
- Process apparatus with on-the-fly substrate centering30 Nov 2023US 2023/0386879 A1Brooks Automation US, LLC
- Process apparatus with on-the-fly substrate centering24 Jun 2021US 2021/0193495 A1Brooks Automation, Inc.
- Alignment apparatus12 Dec 2019US 2019/0378738 A1SEMIgear, Inc.
- Process apparatus with on-the-fly substrate centering23 Mar 2017US 2017/0084476 A1Brooks Automation, Inc.
Most cited
By later US patents
- Modular wafer transport and processing system655US 4,917,556 AVarian Associates, Inc. · 1990
- Wafer processing apparatus with wafer alignment device543US 7,963,736 B2ASM Japan K .K. · 2011
- Method and apparatus for transferring wafers between cassettes and a boat541US 4,770,590 ASilicon Valley Group, Inc. · 1988
- Apparatus and method for loading and unloading wafers529US 4,775,281 ATeradyne, Inc. · 1988
- Method and apparatus for batch processing of wafers in a furnace511US 6,835,039 B2ASM International N.V. · 2004